Advanced Gate Stacks for High-Mobility Semiconductors
- Author
- Athanasios Dimoulas, Evgeni Gusev, Paul C. McIntyre, …
- Publication Year
- 2007
- Publisher
- Springer
- Language
- English
- Document Type
- Book
- Faculty / Subject Heading
- Engineering
- Download Book Read book
Provides a comprehensive monograph on gate stacks in semiconductor technology. The reader will get a clear view of what has been done so far, what is the state-of-the-art and which are the main challenges ahead before we come any closer to a viable Ge and III-V MOS technology.
Keywords: Engineering / CMOS / Semiconductors / Standard / Transistors / Dielectric properties / Dielectrics / Electronics / Material / Microelectronics / Semiconductor / Semiconductor devices / Transistor
