الصفحة 1
الصفحة 1
Piezoelectric Transducers and Applications
Includes these new developments together with a deep revision and enlargement of the topics already included in the first edition. It provides a guide for graduate students and researchers to the current state of the art of this complex and multidisciplinary area. The book fills an urgent need for a unified source of information on piezoelectric devices and their astounding variety of existing and emerging applications. Some of the chapters focus more on the basic concepts of the different disciplines involved and are presented in a didactic manner. Others go deeper into the complex aspects of specific fields of research, thus reaching the technical level of a scientific paper. Among other topics resonant sensors, especially bulk acoustic wave thickness shear mode resonators, chemical and bio-sensors, as well as broadband ultrasonic systems are treated in-depth.
Integrated Chemical Microsensor Systems in CMOS Technology
This book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it provides detailed information on all important issues related to the realization of chemical microsensors in CMOS technology, it also addresses experts well familiar with the field.
Force Sensors for Microelectronic Packaging Applications
This monograph is intended for wire bonding and flip-chip packaging professionals and for scientists and engineers working in the field of mechanical microsensors. New measurement technologies are introduced that allow in situ and real-time examination of physical processes during the packaging process or during subsequent reliability tests. The measurement system presented here enables measurements at formerly inaccessible packaging interconnects. For the first time it becomes possible to describe the wire bonding process window in terms of the physical forces at the contact zone instead of the applied machine settings. This is significant for a deeper understanding of these packaging processes. Applications of the sensor in the field of wire bonding and flip-chip characterization are illustrated. The reader will gain much insight into the important field of interconnection technology in semiconductor packaging.
CMOS Hotplate Chemical Microsensors
Covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integration of nanomaterials, microtechnology and microelectronics.The book provides students, scientists and engineers with an accessible introduction to the field of microhotplate-based chemical sensing, with all the necessary fundamental knowledge included. Beyond that, it also provides detailed information on all important issues concerning complex high-performance CMOS chemical microsensor systems; hence it will also be valuable to experts already familiar with the field.
BioNanoFluidic MEMS
BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes: BioNanoFluidic MEMS connection between the interdisciplinary nature of BioNanoFluidics and MEMS BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies ands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
