Electroceramic-Based MEMS
Publication year: 2005
ISBN: 978-0-387-23319-2
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The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed.The book is addressed to engineers, scientists and researchers of various disciplines.
Subject: Chemistry and Materials Science, Sensor, Ceramics, Communication, Electronics, Ferroelectrics, Microelectromechanical System (MEMS), Thin film
