Dynamics of MEMS
Publication year: 2007
ISBN: 978-0-387-68195-5
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This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of problems that involve reliable modeling, analysis and design, Analytical models with correct dependences on service dimensions, Cantilever based systems for nanofabrication researchers and designers, and Dynamics of complex spring and beam microsystems.
Subject: Engineering, Dynamics, Electrical, Lobontiu, MEMS, Micro, Nano, Vibrations, design, frequency-domain analysis, impedance, mechanical-electrical analogy, mechanics, microelectromechanical system (MEMS), modeling, substrate losses
