Publication year: 2007
ISBN: 978-3-540-71491-0
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This book provides a comprehensive monograph on gate stacks in semiconductor technology. The reader will get a clear view of what has been done so far, what is the state-of-the-art and which are the main challenges ahead before we come any closer to a viable Ge and III-V MOS technology.
Subject: Engineering, CMOS, Semiconductors, Standard, Transistors, dielectric properties, dielectrics, electronics, material, microelectronics, semiconductor, semiconductor devices, transistor