Mechanics of Microelectromechanical Systems
Publication year: 2005
ISBN: 978-0-387-23037-5
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This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpointelectric energy.
Subject: Engineering, Lobontiu, MEMS, NEMS, Sensor, design, mechanics, mechanism design, microelectromechanical system (MEMS), microsystems, modeling
