Micro and Nanomanufacturing
Publication year: 2007
ISBN: 978-0-387-26132-4
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Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn: Manufacturing and fabrication at the micro and nanoscales Using bulk and surface micromachining techniques, LiGA and deep x-ray lithography to manufacture semiconductors Producing master molds with micromachining The deposition of thin films, pulsed water drop machining, and nanomachining Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.
Subject: Engineering, Manufacturing, Microfabrication, Nano, design, mechanical engineering, nanotechnology, silicon
