Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Publication year: 2006
: 978-0-387-28843-7
Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology.
: Engineering, CMOS, Co-integration, Gas-flow sensors, REM, Silicon-on-Insulator, TMAH released membranes, Thin-films residual stress, Transistor, basics, crystallography, interferometry
