Mechanics of Microelectromechanical Systems
Publication year: 2005
: 978-0-387-23037-5
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpointelectric energy.
: Engineering, Lobontiu, MEMS, NEMS, Sensor, design, mechanics, mechanism design, microelectromechanical system (MEMS), microsystems, modeling
