Sputtering by Particle Bombardment
Publication year: 2007
: 978-3-540-44502-9
This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented.
: Physics and Astronomy, Energie, Helium-Atom-Streuung, distribution, dynamics, ion sputtering, particle bombardment, plasma physics, sputtering
