Rare Earth Oxide Thin Films
Publication year: 2007
: 978-3-540-35797-1
In the book the state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface with semiconducting substrates are discussed.
: Physics and Astronomy, Deposition methods, EELS, Experiment, High-k dielectrics, Microelectronics, PED, REM, Rare earth oxides, microscopy, semiconductor, spectroscopy, spintronics, thin film, thin films, transmission electron microscopy
