Ion Implantation and Synthesis of Materials
Publication year: 2006
: 978-3-540-45298-0
This book presents the physics and materials science of ion implantation and ion beam modification of materials. It covers ion-solid interactions used to predict ion ranges, ion straggling and lattice disorder. Also treated are shallow-junction formation and slicing silicon with hydrogen ion beams. Topics important for materials modification, such as ion-beam mixing, stresses, and sputtering, are also described.
: Physics and Astronomy, Diffusion, Doping, Implanted shallow junctions, Ion implantation, Ion ranges, Ion-modified materials, Slicing silicon, crystal, distribution, materials properties, materials science
