الصفحة 1
الصفحة 1
Micro and Nanomanufacturing
Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn: Manufacturing and fabrication at the micro and nanoscales Using bulk and surface micromachining techniques, LiGA and deep x-ray lithography to manufacture semiconductors Producing master molds with micromachining The deposition of thin films, pulsed water drop machining, and nanomachining Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.
CMOS Hotplate Chemical Microsensors
Covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integration of nanomaterials, microtechnology and microelectronics.The book provides students, scientists and engineers with an accessible introduction to the field of microhotplate-based chemical sensing, with all the necessary fundamental knowledge included. Beyond that, it also provides detailed information on all important issues concerning complex high-performance CMOS chemical microsensor systems; hence it will also be valuable to experts already familiar with the field.
BioMEMS and biomedical nanotechnology ; Vol. II : Micro/Nano Technologies for Genomics and Proteomics
Numerous miniaturized DNA microarray, DNA chip, Lab on a Chip and biosensor devices have been developed and commercialized. Such devices are improving the way many impor-tant genomic and proteomic analyses are performed in both research and clinical diagnostic laboratories. The development of these technologies was enabled by a synergistic combina-tion of disciplines that include microfabrication, microfluidics, MEMS, organic chemistry and molecular biology. Some of these new devices and technologies utilize sophisticated mi-crofabrication processes developed by the semiconductor industry.
