الصفحة 1
الصفحة 1
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology.
Handbook of modern sensors. physics, designs, and applications
Presents a comprehensive and up-to-date account of the theory (physical principles), design, and practical implementations of various sensors for scientific, industrial, and consumer applications. This latest edition focuses on the sensing technologies driven by the expanding use of sensors in mobile devices. These new miniature sensors will be described, with an emphasis on smart sensors which have embedded processing systems. The chapter on chemical sensors has also been expanded to present the latest developments.
