Rare Earth Oxide Thin Films
Publication Date: 2007
ISBN: 978-3-540-35797-1
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In the book the state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface with semiconducting substrates are discussed.
Subject: Physics and Astronomy, Deposition methods, EELS, Experiment, High-k dielectrics, Microelectronics, PED, REM, Rare earth oxides, microscopy, semiconductor, spectroscopy, spintronics, thin film, thin films, transmission electron microscopy
